Semiconductor & Electronics

Widely deployed in wafer wet etching, cleaning and stripping processes, ultra-pure water (UPW) delivery systems, chemical distribution systems (CDS), waste gas scrubbing, wastewater treatment, and special gas absorption systems, magnetic drive pumps reliably convey high-purity and complex media including sulfuric acid, nitric acid, hydrofluoric acid, ammonium hydroxide, photoresist, and CMP slurry.

Due to stringent process specifications, on-site operations commonly face critical challenges: high risk of medium contamination, insufficient transfer stability, poor compatibility with highly corrosive fluids, high maintenance costs, substantial downtime losses, strict explosion-proof and safety compliance pressure, and difficulties in cleanliness control.

To address these pain points, Shaanxi Hono Electronic Technology Co., Ltd. adopts fully fluorinated or high-purity non-metallic magnetic drive pumps to accommodate diverse working conditions, such as ultra-pure water, high-purity chemicals, highly corrosive acids and alkalis, and particle-containing slurries. We design a modular system architecture consisting of single pump / redundant pump + process piping + control unit + safety accessories.By linking the pump's built-in basic control with the PLC control system, and equipped with variable frequency speed regulation, automatic fault diagnosis and protection functions, the system realizes precise flow and pressure control as well as stable operation. It also supports automatic switchover between primary and standby pumps to ensure uninterrupted production line operation.

• Zero leakage and high cleanliness to eliminate medium contamination risks;
• Superior corrosion resistance, compatible with full-range process chemicals;
• High operational stability to guarantee continuous production processes;
• Low maintenance requirements and reduced production shutdown risks;
• Full safety compliance, meeting factory explosion-proof and environmental protection standards;
• Full-process integrated services to match factory automation specifications.

1. Custom Single Pump Solution: Tailored pump models and wetted materials based on medium properties and process parameters.

2. Control Cabinet Integration: Custom explosion-proof and clean-type control cabinets integrated with frequency conversion control, fault alarm, data acquisition and remote communication modules.

3. Piping Design & Optimization: Semiconductor clean-grade piping design (PFA / high-purity EP stainless steel), with optimized pipeline routing and valve configuration.

4. Automation Integration & Commissioning: Seamless connection with factory existing DCS/PLC systems to realize linkage control between pump units and process equipment. On-site installation guidance, commissioning and validation services are provided to ensure the system meets stringent cleanliness and stability requirements.

 Please consult with our engineers to discuss your project requirements and obtain a quotation. Contact us via email at liuziyan@sxhono.com.cn.