Introduction
The HD100R semiconductor magnetic pump is a professional transfer equipment tailor-made for the semiconductor industry. Featuring a sealless magnetic drive structure, it delivers zero leakage and zero external contamination throughout operation, fully meeting the high-level cleanliness requirements of semiconductor workshops.
The wetted parts of this PTFE magnetic pump for semiconductors are made of high-purity PTFE, which resists various highly corrosive semiconductor chemicals with no ion precipitation or medium permeation. It safely transfers special chemicals such as etching solutions, cleaning solutions and high-purity reagents. The integrally formed dead-space-free pump body with high-gloss surface allows thorough cleaning and effectively prevents medium residue and cross-contamination. As a reliable magnetic pump for semiconductor chemicals, it runs steadily with low vibration and supports 24-hour continuous operation. Widely used in wafer fabrication, chip packaging and semiconductor wet processes, it serves as a core device for conveying corrosive high-purity chemicals in the semiconductor sector.
Product Structural Schematic
Technical Parameter
|
Model |
Tube interface |
Spiral interfaceR-M RX-MRZ-M |
Max.Capacity (L/min) |
Max.Head(m) |
Specific weight |
Motor |
Weight (kg) |
|||
|
Inlet (mm) |
Outlet (mm) |
Inlet/ Outlet |
Coupling Dimensions (mm) |
50Hz/60Hz |
50Hz/60Hz |
Out put(w) 50Hz/60Hz |
Phase |
|||
|
HD100R |
26 |
26 |
G1 |
20 |
120/135 |
8.6/11.9 |
1.2 |
260/265 |
1or3 |
8.1 |
Performance Curve
Key Advantages
1. Integrally Formed High-purity PTFE with Excellent Corrosion Resistance
The wetted parts of this PTFE magnetic pump for semiconductors are integrally compression-molded with thickened high-purity PTFE. Compared with conventional spliced PTFE pumps, it features greatly improved resistance to permeation of highly corrosive chemicals and higher pressure resistance. It is fully applicable to long-term delivery of high-concentration etching solutions and strippers for semiconductors, and prevents material delamination, bulging and ion precipitation.
2. High-flow Structure for Stable Delivery
The custom high-flow hydraulic module is designed for mass-production semiconductor lines. It offers a wider flow range and stable pressure output to supply liquid for multiple wet process lines simultaneously, resolving the problems of insufficient head and drastic flow fluctuation of ordinary magnetic pumps under high-flow conditions.
3. High-load Fully Sealed Magnetic Drive System
This magnetic pump for semiconductor chemicals is fitted with upgraded reinforced magnetic coupling components for higher torque capacity. Combined with a fully sealed dustproof and anti-corrosion housing, it sustains long-term full-load continuous operation and isolates airborne particles and corrosive gas in dust-free workshops to protect core transmission parts.
4. Large-capacity Dead-space-free Cavity Design
The enlarged cavity of HD100R adopts optimized smooth transition with no liquid retention dead corners. Its high-gloss inner wall enables faster and more thorough on-line cleaning. Ideal for alternate delivery of various semiconductor chemicals, it completely avoids cross-contamination risks.
5. High-pressure Resistant Structure for Complex Pipeline Conditions
The pump housing and connecting parts are reinforced for high pressure, with better pressure bearing capacity than similar models. It adapts to complex pipelines, long-distance delivery and fluctuating pipeline pressure in semiconductor workshops, and operates stably without leakage or deformation.
Typical Applications
● Long-distance transportation of high-concentration hydrofluoric acid for wafer etching
The integrally compression-molded thickened PTFE material of HD100R resists long-term permeation of hydrofluoric acid, avoiding shell delamination and bulging during long-distance high-pressure transportation.
● Centralized liquid supply for parallel semiconductor wet process production lines
Equipped with a dedicated high-flow hydraulic module, this semiconductor industrial magnetic pump features extremely low attenuation of delivery head and flow rate. It can stably supply liquid for more than 3 cleaning and etching production lines independently, replacing parallel deployment of multiple small-flow magnetic pumps.
● Alternating circulating transportation of diversified acid-base chemicals for semiconductors
With an expanded smooth dead-space-free cavity and high-gloss inner wall, it leaves no chemical residue after online cleaning, thoroughly preventing cross-contamination during alternating delivery of etching solutions and strippers, and adapting to frequent chemical switching working conditions.
Dimension(mm)
|
Model |
W |
H |
L |
a |
b |
c |
h |
e |
f |
g |
i |
|
HD100R |
156 |
174 |
335 |
70 |
100 |
110 |
74 |
65.5 |
44 |
147 |
4-9*27 |
FAQ
Q: During long-distance chemical liquid transportation, will backwater impact from pipelines cause pump leakage and deformation due to insufficient pressure resistance?
A: No pressure failure will occur with standard pipeline layout. Pressure loss inevitably exists in long-distance semiconductor etching liquid pipelines, and reverse backwater impact is likely to occur during equipment shutdown and branch pressure regulation. As a semiconductor industrial magnetic pump, HD100R adopts targeted pressure reinforcement for long-distance backwater working conditions. Carbon fiber reinforced liners are embedded at joints of pump casing flanges and pump covers, with a rated pressure resistance up to 1.6MPa. It can offset dynamic pipeline backwater pulse pressure. Meanwhile, the integrally molded PTFE casing has no splicing gaps, preventing casing cracking and liquid leakage, and supporting semiconductor chemical transportation over 100 meters.
Q: Will the high-flow delivery mode of HD100R reduce hydraulic efficiency?
A: No hydraulic efficiency attenuation occurs within the rated high-flow range. Equipped with customized wide-section volute and forward-inclined low-vortex impeller, HD100R optimizes flow path curvature matching. Its hydraulic efficiency remains stably above 78% across all rated high-flow working conditions without efficiency decline with rising flow rate, and ensures uniform branch pressure for parallel multi-line liquid supply.
Q: Where to buy the HD100R semiconductor magnetic pump?
A: You may contact our sales team via the email juicy@sxhono.com.cn to obtain product specifications, quotations and selection recommendations. If you have special application requirements, we can also provide you with customized fluid transfer solutions.
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